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Cleanroom (Ⅱ) — Operational Monitoring Guide: 1 CFM & Point Strategy
This article explains why online cleanroom monitoring favors 1 CFM (28.3 L/min) and how to plan representative sampling points using a practical Room → Process → Risk method. Larger minute-volume improves detection probability for small particles and shortens response time for transient spikes. We cover engineering essentials—isokinetic probes, optimized tubing, and routine calibration—to keep high-flow data stable. A “good-enough” alarm framework (baselines, SPC limits,...
